COXEM is a provider of superb solutions in scanning electron microscope (SEM), scanning probe microscope (SPM), confocal microscope and X-ray fluorescence spectroscope (XRF) for scientific and industrial purposes. COXEM offer a specific system for your needs with an extensive know-how in nano-metrology. We are a spin-off company from KRISS (Korea Research Institute of Standards Institute of Standards and Science) and our major shareholders are the governmental funds.

Scanning Electron Microscope
Versatile Tool to Access the Nano-World

The electron microscope is the most commonly used tool in surface metrology generally and it is widely used in educational programs, R&D and quality control. The CX-100S SEM is a powerful tool for surface characterization which produces high quality images with nano-scale resolution. The CX-100S is a classical Analytical SEM with a tungsten filament as the electron source. It offers the digital images with high resolution and image contrast by a secondary electron detector. We also supply EDS(ThermoTM) and BSE (RobinsionTM) detectors with CX-100S.

Scanning Probe Microscope
Evolution of Atomic Force Microscope

SPM covers the full range scanning probe microscopy techniques to investigate the surface properties like as topography, electronic, magnetic characteristics from nano- scale to several tens of micron. The state- of-the-art DSP-based fast digital controller provides not only much easy and flexible operational interface but also sufficient high speed/resolution imaging solution. Also, our system provides very versatile Ethernet- based remote control of the SPM instrument. Advance nanolithography tool supports the very convenient interface as well as various probe-based writing techniques.

Confocal Laser Scanning Microscope

Confocal Laser Scanning Microscopy is a optical 3-dimensional surface profiler with a high-resolution. With a high numerical aperture objective lens (up to 0.95) and a shorter wavelength laser provide a high-resolution imaging along both the optical and transverse direction. A confocal pinhole also improves the imaging quality by rejecting the noise outside the focal point. Real time imaging is achieved by a fast scanning module and a signal processing algorithm. It takes less than 1 second to get the 3D surface profile of the sample. CLSM is a non-destructive high-resolution optical 3D surface profiler for the micro-structure. It is an ideal solution to measure and inspect the semiconductor wafers, FPD products, MEMS devices, glass surfaces, and material surfaces.