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  CX-100S SEM

Scanning Electron Microscope
Versatile Tool to Access the Nano-World

The optical microscope is the most commonly used tool in surface metrology generally
and it is widely used in educational programs, R&D and quality control. However, the
optical microscope can not fulfill the growing demand for higher magnification due to its
physical limitations. The CX-100S SEM is a powerful tool for surface characterization
which produces high quality images with nano-scale resolution. Its software is using
the graphical user interface and based-on and Microsoft Windows XP.



Indispensable Tool for Materials Analysis

CX-100S is an indispensable tool for various application areas in materials analysis.
It has a high resolution (3.5 nm at 30 kV acceleration voltage and SE detector) and a
high magnification imaging for surface morphology in the nanoscale. The clean imaging
is due to its long depth of focus.



User Friendly Operation

NanostationTM is the powerful software for the system control and image analysis for
the CX-100S SEM. It is designed and based-on Microsoft Windows XP and adapted a
user-friendly interface. NanostationTM allows for a customized toolbars for repeat job
setup.



High Performance / Economic Grade

The CX-100S is a state-of-the-art SEM with a veriety of detector choices, the user can
enjoy a high performance SEM at an economic price.



Rapid Analysis

The CX-100S uses an oil-free turbo molecular pump. The speed of the pump will allow
for imaging in under five minutes up to 10-6 torr.



Diverse Range of Applications

CX-100S provides the best imaging solution over a wide spectrum of samples from
bio-molecules to metal samples. The CX-100S can be equipped with additional
detectors like EDS and/or BSE and can run both simultaneously.



Specification: CX-100S

Resolution 3.5 nm (at 30 kV, SE image)
Magnification X30 to X300,000
Accelerating voltage 0.5 ~ 30 kV
Electron gun W (Tungsten), Pre-centered cartridge filament
Lens system 2 condenser lenses, objective lens
Objective IRIS Variable apertures with 4 different diameters
Stage Manual Stage (standard)
5 axes automatic stage (optional)
-   X: 60 mm, Y: 40 mm, Z: 5~50 mm, T: 20¡Æ, R: 360¡Æ
Operation Mouse and keyboard on Intel dual-core CPU and MS Windows XP
Scanning Mode Reduced window: 320 x 240 pixels
Full: 640 x 480 pixels
Slow: 640 x 480 pixels (3 steps)
Photo 1: 1280 x 960 pixels
Photo 2: 2560 x 1920 pixels
Freeze
Vacuum system Fully automated turbo molecular pump, 210 liters/sec
(or Diffusion pump, 570 liters/sec)
Rotary pump, 100 liters/min
Image format JPG or BMP
Language English or Korean
Dimension & Weight Main system: 77(W) x 88(D) x 150(H) cm, 310 kg
Operation Table: 100(W) x 80(D) x 70(H) cm, 10 kg
Power Single phase AC100, 110, 115, 200, 220 or 240 V ?
50/60 Hz, 2 kVA