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CX-100S SEM |
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Scanning Electron Microscope
Versatile Tool to Access the Nano-World |
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The optical microscope is the most commonly used tool in surface metrology generally
and it is widely used in educational programs, R&D and quality control. However, the
optical microscope can not fulfill the growing demand for higher magnification due to its
physical limitations. The CX-100S SEM is a powerful tool for surface characterization
which produces high quality images with nano-scale resolution. Its software is using
the graphical user interface and based-on and Microsoft Windows XP.
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Indispensable Tool for Materials Analysis
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CX-100S is an indispensable tool for various application areas in materials analysis.
It has a high resolution (3.5 nm at 30 kV acceleration voltage and SE detector) and a
high magnification imaging for surface morphology in the nanoscale. The clean imaging
is due to its long depth of focus.
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User Friendly Operation
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NanostationTM is the powerful software for the system control and image analysis for
the CX-100S SEM. It is designed and based-on Microsoft Windows XP and adapted a
user-friendly interface. NanostationTM allows for a customized toolbars for repeat job
setup.
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High Performance / Economic Grade
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The CX-100S is a state-of-the-art SEM with a veriety of detector choices, the user can
enjoy a high performance SEM at an economic price.
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Rapid Analysis
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The CX-100S uses an oil-free turbo molecular pump. The speed of the pump will allow
for imaging in under five minutes up to 10-6 torr.
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Diverse Range of Applications
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CX-100S provides the best imaging solution over a wide spectrum of samples from
bio-molecules to metal samples. The CX-100S can be equipped with additional
detectors like EDS and/or BSE and can run both simultaneously.

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Specification: CX-100S
| Resolution
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3.5 nm (at 30 kV, SE image)
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| Magnification
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X30 to X300,000
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| Accelerating voltage
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0.5 ~ 30 kV
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| Electron gun
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W (Tungsten), Pre-centered cartridge filament
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| Lens system
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2 condenser lenses, objective lens
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| Objective IRIS
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Variable apertures with 4 different diameters
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| Stage
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Manual Stage (standard)
5 axes automatic stage (optional)
- X: 60 mm, Y: 40 mm, Z: 5~50 mm, T: 20¡Æ, R: 360¡Æ
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| Operation
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Mouse and keyboard on Intel dual-core CPU and MS Windows XP
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| Scanning Mode
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Reduced window: 320 x 240 pixels
Full: 640 x 480 pixels
Slow: 640 x 480 pixels (3 steps)
Photo 1: 1280 x 960 pixels
Photo 2: 2560 x 1920 pixels
Freeze
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| Vacuum system
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Fully automated turbo molecular pump, 210 liters/sec
(or Diffusion pump, 570 liters/sec)
Rotary pump, 100 liters/min
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| Image format
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JPG or BMP
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| Language
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English or Korean
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| Dimension & Weight
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Main system: 77(W) x 88(D) x 150(H) cm, 310 kg
Operation Table: 100(W) x 80(D) x 70(H) cm, 10 kg
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| Power
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Single phase AC100, 110, 115, 200, 220 or 240 V
? 50/60 Hz, 2 kVA
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