COXEM

Th​e ion co​ater, SPT-20, is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using DC sputtering princi​ple. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.

1. Digital ion coater

2. Vacuum. coating. One touch coating system up to the normal pressure

3. Stable coating with coating Current Feedback function

4. Can be used with various​ metal targets 

5. Uses low-noise rotary pump